File:EUV defect edge extension.JPG
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Summary
| Description |
English: The loss in reflectivity due to the slope corresponding to a defect edge. Outside the sloped region, the surface is assumed flat, giving the full reflectivity of the multilayer (angle of incidence is 6 degrees). Within the sloped region, the tilt results in incident light at the wrong angle of incidence, which reduces the multilayer reflectivity as the light deviates further from normal incidence.
The reference data for multilayer reflectivity vs. angle of incidence was obtained at the CXRO web site. The multilayer consists of 40 6.9 nm periods containing Si (60%) on Mo (40%) on an SiO2 substrate. |
| Date | 22 June 2008 (original upload date) |
| Source | Transferred from en.wikipedia to Commons. |
| Author | Guiding light at English Wikipedia |
Licensing
Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
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Attribution: Guiding light at English Wikipedia
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Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License. |
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Original upload log
The original description page was here. All following user names refer to en.wikipedia.
| Date/Time | Dimensions | User | Comment |
|---|---|---|---|
| 2008-06-22 11:05 | 416×318× (21248 bytes) | Guiding light | The loss in reflectivity due to the slope corresponding to a defect edge. Outside the sloped region, the surface is assumed flat, giving the full reflectivity. Within the sloped region, the tilt results in incident light at the wrong angle of incidence, w |
File history
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 10:06, 28 February 2016 | | 416 × 318 (21 KB) | FastilyClone | Transferred from enwp |
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